Название: Design, Modeling and Control of Nanopositioning Systems автор: Andrew J. Fleming, Kam K. Leang Издательство: Springer Год выпуска: 2014 ISBN: 978-3319066165 Формат: PDF Размер: 17 MB Количество страниц: 411 Язык: Английский Описание: Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe